High Accuracy Analog Mems Accelerometer

• Customization: Available
• Type: Capacitive
• Output Signal Type: Analog Output
• Model NO.: MA1000
• Measuring Shaft Quantities: 1
• Accuracy Grade: 0.05mg
• IP Rating: Chip
• Certification: ISO
• Customized: Non-Customized
• Interface: Voltage
• Power Supply: 4.75~5.25V
• Transport Package: Carton
• Specification: LCC20 encapsulation (9*9mm)
• Trademark: SkyMEMS
• Origin: China
• HS Code: 9014100000
• Production Capacity: 1000/Month

Product Description

Main Features
-Range: ±2g/±3g, excellent bias stability: 0.05mg
-Output: differential output/single-ended output
-Single power supply: 4.75~5.25V
-Bandwidth (-3dB): 1000Hz
-Low Noise: ≤1.2μg/√Hz (@100Hz), fully calibrated
-Embedded temp. sensor& precision reference voltage
-Extra small LCC20 package (9.0mm x 9.0mm)
-Wide operating temperature range: -40~+125°C


Brief Introduction
MA1000MEMS accelerometer is the best closed loop high performance capacitive accelerometer, it adopts high performance ASIC and MEMS sensor to build closed-loop system, it enjoys excellent performance with low noise, dynamic range, non-linearity, repeatability, temperature drift and shock resistance.
MA1000accelerometer also has the ability of built-in-self test, temperature sensor for compensation and built-in high precision reference voltage, which ensures MA1000to be the top level of accelerometer around the world. Using tiny sealed LCC20 encapsulation (9*9mm), MA1000has been widely used in Seismic Monitor, Micro-vibration Monitoring, Engineering Geophysical Exploration, Structure/Building Monitoring, Surface Wave Detection, and Inclination Measurement, etc.MA1000accelerometer's high reliability and excellent performance gains customers' high praise.

Technical Specifications

Parameter	MA1000		Unit
	MA1002	MA1003
Range	±2	±3	g
Non-linearity (full range)	0.1	0.1	%
Frequency Response (±5% bandwidth)	≥100	≥100	Hz
Frequency Response (±3dB bandwidth)	≥1000	≥1000	Hz
Noise Spectral Density(@100Hz)	1.2	1.3	μg/√Hz
Bias Temperature Coefficient (maximum)	0.4	0.4	mg/ºC
Bias Stability (1hour, 1σ, 1s)	0.05	0.05	mg
Scale Factor	1800	1200	mV/g
Scale Factor Temperature Coefficient	50	50	ppm/ºC
Scale Factor Stability	50	50	ppm
Scale Factor Repeatability	50	50	ppm
Axis misalignment
Input Axis Misalignment (Kp,Ko)	10 (max.)		mrad
Self Test
Frequency (Square wave output)	19		Hz
Duty cycle	50		%
Amplitude (Peak to peak)	0.28	0.55
			g
STEN Input Threshold Voltage (High level is valid)	0.8 (min.)		Vcc
Temperature Sensor
Output Voltage (@25°C)	2.47		V
Sensitivity	8.3		mV/ºC
Output Current Load	20 (max.)		μA
Output Capacitive Load	30 (max.)		pF
Reset
RSTN Input Threshold Voltage	0.2 (max. , Low level is valid)		Vcc
Power Supply (Vcc)
Input Voltage	5		V
Running Current Consumption	5.4		mA
Startup Time (Turn on or RSTN pull-up)	10		ms
Accelerometer Output
Output Voltage	±3.6 (full range differential output)		V
Resistance Load	10 (min.)		kΩ
Capacitive Load	30 (max.)		pF

Typical Applications
- Seismic Monitor

- Micro-vibration Monitoring


- Inertial Navigation


- Structure/Building Monitoring


- Platform Stability



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