Closed-Loop Mems Seismic Capacitive Accelerometer

• Customization: Available
• Type: Capacitive
• Output Signal Type: Analog Output
• Model NO.: MA1000A
• Measuring Shaft Quantities: 1
• Accuracy Grade: 0.05mg
• IP Rating: Chip
• Certification: ISO
• Customized: Non-Customized
• Interface: Voltage
• Power Supply: 4.75~5.25V
• Transport Package: Carton
• Specification: LCC20 encapsulation (9*9mm)
• Trademark: SkyMEMS
• Origin: China
• HS Code: 9014100000
• Production Capacity: 1000/Month

Product Description

Main Features
-Range:±2g~±30g, Excellent Bias Stability
-Output: Differential Output / Single-Ended Output
-Very Low Noise: 1.2μg/√Hz for ±2g Range (typical)
-Input Power Supply: 4.75~5.25V
-Embedded Self-Test Function and Temperature Sensor
-Embedded Precision Reference Voltage
-Shock Survivability: 6000g, Vibration Resistance
-Wide Operating Temperature Range: -40~+125°C


Brief Introduction
MA1000A MEMS accelerometer is the besthigh performance capacitive accelerometer adopting closed loop structure, it useshigh performance ASIC and MEMS sensor to build closed-loop system, andit enjoys excellent performance with low noise, dynamic range, non-linearity, repeatability, temperature drift and shock resistance. MA1000A guarantees confident and accurate vibration measurement in rugged environments.
MA1000A accelerometer also has embeddedself-test function, temperature sensor for compensation and built-in high precision reference voltage, which ensures MA1000A to be the top level of accelerometer around the world. Using tiny sealed LCC20 encapsulation (9*9mm), MA1000A has been widely used in Seismic Monitor, Micro-vibration Monitoring, Engineering Geophysical Exploration, Inertial Navigation, Structure/Building Monitoring, Surface Wave Detection, and Platform Stability, etc. Eachaccelerometer is fully tested and qualified, and its superreliability and excellent performance gains customers' high praise

Technical Specifications

Parameter	MA1000A					Unit
	MA1002A	MA1003A	MA1005A	MA1010A	MA1030A
Range	±2	±3	±5	±10	±30	g
Non-linearity (full range)	0.1	0.1	0.1	0.1	0.1	%
Frequency Response (±5% bandwidth)	>100	>100	60	60	60	Hz
Frequency Response (±3dB bandwidth)	>1000	>1000	200	200	200	Hz
Noise Spectral Density(@100Hz)	1.2	1.5	1.8	2.5	3	μg/√Hz
Bias Temperature Coefficient (maximum)	0.3	0.3	0.3	0.3	0.3	mg/ºC
Bias Stability (1hour, 1σ, 1s)	0.05	0.05	0.05	0.05	0.05	mg
Scale Factor	1800	1200	720	360	120	mV/g
Scale Factor Temperature Coefficient	50	50	50	50	50	ppm/ºC
Scale Factor Stability	50	50	50	50	50	ppm
Scale Factor Repeatability	50	50	50	50	50	ppm
Axis misalignment
Input Axis Misalignment (Kp,Ko)	10 (max.)					mrad
Self Test
Frequency (Square wave output)	19					Hz
Duty cycle	50					%
Amplitude (Peak to peak)	0.28	0.55	0.55	0.55	0.55
						g
STEN Input Threshold Voltage (High level is valid)	0.8 (min.)					Vcc
Temperature Sensor
Output Voltage (@25°C)	2.47					V
Sensitivity	8.3					mV/ºC
Output Current Load	20 (max.)					μA
Output Capacitive Load	30 (max.)					pF
Reset
RSTN Input Threshold Voltage	0.2 (max. , Low level is valid)					Vcc
Power Supply (Vcc)
Input Voltage	5					V
Running Current Consumption	5.4					mA
Startup Time (Turn on or RSTN pull-up)	10					ms
Accelerometer Output
Output Voltage	±3.6 (full range differential output)					V
Resistance Load	10 (min.)					kΩ
Capacitive Load	30 (max.)					pF

Typical Applications
- Seismic Monitor
- Micro-vibration Monitoring
- Engineering Geophysical Exploration
- Inertial Navigation
- Structure/Building Monitoring
- Surface Wave Detection
- Platform Stability