Single Axis Mems Capacitive Accelerometer

• Type: Capacitive
• Output Signal Type: Analog Output
• Measuring Shaft Quantities: 1
• Accuracy Grade: Low Noise: 1.5ug
• IP Rating: IP44
• Certification: ISO
• Model NO.: MAS3009
• Customized: Non-Customized
• Interface: Voltage
• Power Supply: 7~24V or 5V+-3%
• Transport Package: Carton
• Specification: 19.8*19.8mm
• Trademark: SkyMEMS
• Origin: China
• HS Code: 9014100000
• Production Capacity: 1000/Month

Product Description

Main Features
-Single Axis MEMS Capacitive Accelerometer
-Range:±2g/±3g, Excellent Bias Stability
-Dynamic Range: ≥110dB, Bandwidth (-3dB): 1000Hz
-Low Noise: ≤1.5μgrms/√Hz
-Non-linearity: 0.1%FS (Full Range)
-Extremely Reliable in Harsh Environment
-Wide Operating Temperature Range: -40~+85°C
-Size: 19.8*19.8mm


Brief Introduction
MAS3009single axis MEMS accelerometer sensor is one type of high performance vibration monitoring sensor base on MEMS technogies. It adopts ±6.5V power supply, it is specially designed for seismic monitor and vibration monitoring, the dynamic range can reach 110dB.
MAS3009accelerometer sensor has passed the strictest tests, it enjoys excellent performance in noise, dynamic range, non-linearity, repeatability, temperature drift, shock proof, etc. this product is an ideal option for seismic monitor, vibration monitoring, high speed train/metro train, test platform of vibration and shocking, machine health monitoring, etc.

Technical Specifications

Type	MAS3009-2	MAS3009-3	Remarks
Axis Number	1	1
Range	±2g	±3g
Zero Bias	±20mV	±20mV
Scale Factor Sensitivity (Differential Output )	1800±20mV/g	1200±20mV/g
Bandwidth (±5%)	80Hz	80Hz
Bandwidth (-3dB)	1000Hz	1000Hz	(adjustable)
Output Noise	1.5μg/√Hz	1.5μg/√Hz
Non Linearity	0.1%F.R	0.1%F.R
Cross-axes Influence	0.03	0.03
Bias Temperature Coefficient	±0.2mg/°C	±0.2mg/°C
Scale Factor Temperature Coefficient	120ppm/°C	120ppm/°C
Accelerometer Output
Differential Output	0~ ±3.6V		OutP, OutN full range output
	OutP :-2~2V OutN: -2~2V
Self Test Function
Frequency	19Hz		square wave output
Duty Ratio	0.5
Amplitude	0.8g		peak value
Self Test Threshold Voltage	4Vmin  5Vmax		High level is valid
Temperature Output
Output Voltage	2.5V@25°C
Sensitivity	8.4mV/°C
Electrical Specs
Working Voltage	±6.5V
Working Current	≤8mA (positive power supply)
Startup Time	20ms
Environment Performance
Operating Temperature	-40~+85°C
Storage Temperature	-55~+125°C
Shock Resistance	6000g
Physical Specs
Dimensions	24×24mm
Installation Hole Position	19.8*19.8mm (M2 screw)

Typical Applications
- Seismic Monitor

- Micro-vibration Monitoring


- Inertial Navigation


- Structure/Building Monitoring


- Platform Stability



Heart and Fast Service